Issued Patents 1994
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370951 | Frame-supported pellicle for protection of photolithographic mask | Meguru Kashida, Yuichi Hamada, Hirofumi Kishita, Shinichi Sato, Kouichi Yamaguchi | 1994-12-06 |
| 5368675 | Method for the preparation of a frame-supported pellicle for photolithography | Yuichi Hamada, Yoshihiko Nagata, Meguru Kashida | 1994-11-29 |
| 5350720 | Triple-layered ceramic heater | Nobuo Kawada, Kesazi Harada, Kenji Itou | 1994-09-27 |
| 5327808 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Yuichi Hamada, Meguru Kashida | 1994-07-12 |
| 5324053 | Electrostatic chuck | Makoto Kawai, Shinji Kojima | 1994-06-28 |
| 5308567 | Method for the preparation of a resin membrane | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi | 1994-05-03 |
| 5300348 | Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada, Shinichi Sato +1 more | 1994-04-05 |
| 5286567 | Pellicle for photolithographic mask | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi | 1994-02-15 |