Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350720 | Triple-layered ceramic heater | Nobuo Kawada, Yoshihiro Kubota, Kesazi Harada | 1994-09-27 |
| 5283087 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Kazuhisa Nakashita +2 more | 1994-02-01 |