Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370951 | Frame-supported pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Hirofumi Kishita, Shinichi Sato, Kouichi Yamaguchi | 1994-12-06 |
| 5368675 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1994-11-29 |
| 5327808 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1994-07-12 |
| 5300348 | Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Shinichi Sato +1 more | 1994-04-05 |