Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368675 | Method for the preparation of a frame-supported pellicle for photolithography | Yuichi Hamada, Meguru Kashida, Yoshihiro Kubota | 1994-11-29 |
| 5327808 | Method for the preparation of a frame-supported pellicle for photolithography | Yuichi Hamada, Meguru Kashida, Yoshihiro Kubota | 1994-07-12 |
| 5326649 | X-ray transmitting membrane for mask in x-ray lithography and method for preparing the same | Meguru Kashida, Hitoshi Noguchi | 1994-07-05 |
| 5308567 | Method for the preparation of a resin membrane | Meguru Kashida, Yoshihiro Kubota, Hitoshi Noguchi | 1994-05-03 |
| 5300348 | Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive | Yoshihiro Kubota, Meguru Kashida, Hitoshi Noguchi, Yuichi Hamada, Shinichi Sato +1 more | 1994-04-05 |
| 5286567 | Pellicle for photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Hitoshi Noguchi | 1994-02-15 |