Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Haruo Okano, Takaya Matsushita +1 more | 1994-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Haruo Okano, Takaya Matsushita +1 more | 1994-05-10 |