Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, John S. McKillop, Gary S. Selwyn +1 more | 1994-11-22 |
| 5298720 | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode | Jerome J. Cuomo, Michael V. Grazioso, Charles R. Guarnieri, John E. Heidenreich, III, Gary S. Selwyn +1 more | 1994-03-29 |