Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, Kurt L. Haller, John S. McKillop, Gary S. Selwyn +1 more | 1994-11-22 |
| 5347460 | Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication | Brock Estel Osborn | 1994-09-13 |
| 5338702 | Method for fabricating tungsten local interconnections in high density CMOS | Edward Kobeda, Jeffrey P. Gambino, Nickolas Joseph Mazzeo | 1994-08-16 |