Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, Kurt L. Haller, John S. McKillop +1 more | 1994-11-22 |
| 5298720 | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode | Jerome J. Cuomo, Michael V. Grazioso, Charles R. Guarnieri, Kurt L. Haller, John E. Heidenreich, III +1 more | 1994-03-29 |
| 5294289 | Detection of interfaces with atomic resolution during material processing by optical second harmonic generation | Tony F. Heinz, Syothi Singh, John A. Spinetti, Jr. | 1994-03-15 |