Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5340914 | Microwave processing | Jeffrey D. Gelorme, Michael Hatzakis, David Lewis, Jane M. Shaw, Stanley Joseph Whitehair | 1994-08-23 |
| 5300813 | Refractory metal capped low resistivity metal conductor lines and vias | Rajiv V. Joshi, Hormazdyar M. Dalal, Louis L. Hsu | 1994-04-05 |
| 5298720 | Method and apparatus for contamination control in processing apparatus containing voltage driven electrode | Michael V. Grazioso, Charles R. Guarnieri, Kurt L. Haller, John E. Heidenreich, III, Gary S. Selwyn +1 more | 1994-03-29 |
| 5280154 | Radio frequency induction plasma processing system utilizing a uniform field coil | Charles R. Guarnieri, Jeffrey A. Hopwood, Stanley Joseph Whitehair | 1994-01-18 |