Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5343290 | Surface particle detection using heterodyne interferometer | John S. Batchelder, Donald M. DeCain, Marc A. Taubenblatt | 1994-08-30 |
| 5316970 | Generation of ionized air for semiconductor chips | John S. Batchelder, Vaughn P. Gross, Robert A. Gruver, Kenneth D. Murray | 1994-05-31 |
| 5298975 | Combined scanning force microscope and optical metrology tool | Henri A. Khoury, Calvin K. Chi, Joachim Clabes, Laszlo Landstein, Martin P. O'Boyle +2 more | 1994-03-29 |
| 5294806 | Optical submicron aerosol particle detector | John S. Batchelder, Donald M. DeCain | 1994-03-15 |