Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, Kurt L. Haller, John S. McKillop +1 more | 1994-11-22 |
| 5308414 | Method and apparatus for optical emission end point detection in plasma etching processes | James A. O'Neill, Michael L. Passow | 1994-05-03 |