Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5332441 | Apparatus for gettering of particles during plasma processing | Michael Barnes, Dennis K. Coultas, John C. Forster, John H. Keller | 1994-07-26 |
| 5308414 | Method and apparatus for optical emission end point detection in plasma etching processes | Michael L. Passow, Jyothi Singh | 1994-05-03 |
| 5284549 | Selective fluorocarbon-based RIE process utilizing a nitrogen additive | Michael Barnes, Melanie M. Chow, John C. Forster, Michael Fury, Chang-Ching Kin +2 more | 1994-02-08 |