Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5332441 | Apparatus for gettering of particles during plasma processing | Michael Barnes, Dennis K. Coultas, John H. Keller, James A. O'Neill | 1994-07-26 |
| 5312717 | Residue free vertical pattern transfer with top surface imaging resists | Harbans S. Sachdev, Leo L. Linehan, Scott A. MacDonald, K. Paul Muller, Walter E. Mlynko +1 more | 1994-05-17 |
| 5284549 | Selective fluorocarbon-based RIE process utilizing a nitrogen additive | Michael Barnes, Melanie M. Chow, Michael Fury, Chang-Ching Kin, Harris C. Jones +2 more | 1994-02-08 |