Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5284549 | Selective fluorocarbon-based RIE process utilizing a nitrogen additive | Michael Barnes, Melanie M. Chow, John C. Forster, Michael Fury, Chang-Ching Kin +2 more | 1994-02-08 |