Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369282 | Electron beam exposure method and system for exposing a pattern on a substrate with an improved accuracy and throughput | Soichiro Arai, Hiroshi Yasuda, Yoshihisa Oae | 1994-11-29 |
| 5334846 | Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark | Mitsuhiro Nakano | 1994-08-02 |
| 5329130 | Charged particle beam exposure method and apparatus | Hiroshi Yasuda, Kazutaka Taki, Mitsuhiro Nakano | 1994-07-12 |