Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5334846 | Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark | Junichi Kai | 1994-08-02 |
| 5329130 | Charged particle beam exposure method and apparatus | Junichi Kai, Hiroshi Yasuda, Kazutaka Taki | 1994-07-12 |