Issued Patents 1994
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5372647 | Apparatus for forming thin film | — | 1994-12-13 |
| 5370274 | Apparatus for cleaning a wafer surface | Tadashi Shibata | 1994-12-06 |
| 5366261 | Pipe joint with a gasket retainer | Tsutomu Shinohara, Michio Yamaji, Nobukazu Ikeda, Kenji Yamamoto | 1994-11-22 |
| 5362672 | Method of forming a monocrystalline film having a closed loop step portion on the substrate | Tadashi Shibata, Masaru Umeda | 1994-11-08 |
| 5362461 | Method for recovering calcium fluoride from fluoroetchant | Hiroyuki Harada, Nobuhiro Miki, Toshiro Fukutome, Matagoro Maeno, Norio Terasawa +2 more | 1994-11-08 |
| 5360768 | Method of forming oxide film | Mizuho Morita | 1994-11-01 |
| 5352917 | Electronic device provided with metal fluoride film | — | 1994-10-04 |
| 5326035 | High purity cleaning system | Michiya Kawakami, Yasuyuki Yagi, Makoto Ohwada, Kiyoshi Takahara | 1994-07-05 |
| 5318706 | Method of supplying dilute hydrofluoric acid and apparatus for use in this method for supplying the acid | Nobuhiro Miki, Matagoro Maeno, Ryozi Hirayama | 1994-06-07 |
| 5316645 | Plasma processing apparatus | Atsushi Yamagami, Nobuyuki Okamura, Haruhiro Harry Goto, Tadashi Shibata | 1994-05-31 |
| 5313982 | Gas supply piping device for a process apparatus | Nakahara Fumio, Tuyosi Satoh, Masaru Umeda | 1994-05-24 |
| 5295668 | Metal tube oxidation treatment apparatus | Yoshiyuki Nakahara, Shigeki Hayashi, Takashi Sakanaka, Eiji Ohta, Fumio Nakahara | 1994-03-22 |
| 5291142 | Method and apparatus for measuring the resistance of conductive materials due to electromigration | — | 1994-03-01 |
| 5277835 | Surface treatment agent for fine surface treatment | Masahiro Miki, Hirohisa Kikuyama | 1994-01-11 |