Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370274 | Apparatus for cleaning a wafer surface | Tadahiro Ohmi | 1994-12-06 |
| 5362672 | Method of forming a monocrystalline film having a closed loop step portion on the substrate | Tadahiro Ohmi, Masaru Umeda | 1994-11-08 |
| 5316645 | Plasma processing apparatus | Atsushi Yamagami, Nobuyuki Okamura, Tadahiro Ohmi, Haruhiro Harry Goto | 1994-05-31 |