Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362672 | Method of forming a monocrystalline film having a closed loop step portion on the substrate | Tadahiro Ohmi, Tadashi Shibata | 1994-11-08 |
| 5313982 | Gas supply piping device for a process apparatus | Tadahiro Ohmi, Nakahara Fumio, Tuyosi Satoh | 1994-05-24 |