Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5326035 | High purity cleaning system | Tadahiro Ohmi, Yasuyuki Yagi, Makoto Ohwada, Kiyoshi Takahara | 1994-07-05 |
| 5320821 | Method for producing hydrogen peroxide | Hiromitsu Nagashima, Yukio Ishiuchi, Yasushi Hiramatsu | 1994-06-14 |
| 5302311 | Cleaning solution of semiconductor substrate | Yasuo Sugihara, Kazushige Tanaka | 1994-04-12 |
| 5292496 | Process for the preparation of hydrogen peroxide | Hiromitsu Nagashima, Yukio Ishiuchi, Yasushi Hiramatsu | 1994-03-08 |