Showing 1–11 of 11 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Mitsuo Nishi | Tokyo Electron Limited | 5 |
| 2 | Eiichi Mukai | Tokyo Electron Limited | 2 |
| 2 | Jiro Harada | Harada Industry Co. | 2 |
| 2 | Christoph Daube | Leybold Gmbh | 2 |
| #5 | Hisaya Takahashi | Nec | 1 |
| #5 | Michiaki Aikawa | — | 1 |
| #5 | Nagahiro Kawano | Ngk Insulators | 1 |
| #5 | Kiyoshi Esaki | — | 1 |
| #5 | Hirofumi Shiraishi | Tokyo Electron Limited | 1 |
| #5 | Tadaaki Ohgi | Bonac | 1 |
| #5 | Hisataka Inoue | Hisamitsu Pharmaceutical Co. | 1 |