Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374153 | Transfer apparatus | — | 1994-12-20 |
| 5370142 | Substrate washing device | Takanori Miyazaki, Eiichi Mukai, Yuuji Kamikawa, Hiroshi Tanaka | 1994-12-06 |
| 5319216 | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter | Shori Mokuo, Yoichi Deguchi, Shinji Tadakuma | 1994-06-07 |
| 5311893 | Cleaning apparatus | — | 1994-05-17 |
| 5301700 | Washing system | Yuuji Kamikawa, Kouki Kuroda, Yoshiyuki Honda, Eiichi Mukai | 1994-04-12 |