Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370142 | Substrate washing device | Mitsuo Nishi, Eiichi Mukai, Yuuji Kamikawa, Hiroshi Tanaka | 1994-12-06 |
| 5361787 | Cleaning apparatus | Hiroshi Sakurai | 1994-11-08 |
| 5299584 | Cleaning device | Sinitirou Izumi | 1994-04-05 |