Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5370142 | Substrate washing device | Mitsuo Nishi, Takanori Miyazaki, Yuuji Kamikawa, Hiroshi Tanaka | 1994-12-06 |
| 5301700 | Washing system | Yuuji Kamikawa, Kouki Kuroda, Yoshiyuki Honda, Mitsuo Nishi | 1994-04-12 |