Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5283435 | Apparatus for determining the concentration of a gas in a vacuum chamber | Alfred Belz, Uwe Kopacz | 1994-02-01 |
| 5277778 | Method for coating components or shapes by cathode sputtering | Uwe Kopacz, Siegfried Schulz | 1994-01-11 |