WM

William P. Marsh

VT Vlsi Technology: 2 patents #227 of 594Top 40%
Overall (All Time): #2,277,682 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5503881 Method of processing a semiconductor wafer John L. Cain, Michael P. Relue, Michael E. Costabile 1996-04-02
5439524 Plasma processing apparatus John L. Cain, Michael P. Relue, Michael E. Costabile 1995-08-08