Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5503881 | Method of processing a semiconductor wafer | John L. Cain, Michael E. Costabile, William P. Marsh | 1996-04-02 |
| 5439524 | Plasma processing apparatus | John L. Cain, Michael E. Costabile, William P. Marsh | 1995-08-08 |
| 4719355 | Ion source for an ion implanter | Victor Meyers | 1988-01-12 |