EZ

Eric Kurt Zwirnmann

VP Veeco Precision Surface Processing: 3 patents #8 of 20Top 40%
Overall (All Time): #1,444,959 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10553502 Two etch method for achieving a wafer thickness profile Laura Mauer, John Taddei, John Clark, Elena Lawrence, David Goldberg +1 more 2020-02-04
10446387 Apparatus and method to control etch rate through adaptive spiking of chemistry Laura Mauer, John Taddei, James Swallow, David Goldberg 2019-10-15
10026660 Method of etching the back of a wafer to expose TSVs Laura Mauer, John Taddei, John Clark, Elena Lawrence, David Goldberg +1 more 2018-07-17