MD

Michael S. DeLucia

VA Varian Semiconductor Equipment Associates: 4 patents #157 of 513Top 35%
🗺 Massachusetts: #27,608 of 88,656 inventorsTop 35%
Overall (All Time): #1,159,371 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
11114277 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2021-09-07
10741361 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2020-08-11
10446372 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2019-10-15
9978554 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2018-05-22