Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12239024 | Method of forming micro-electromechanical system device | — | 2025-02-25 |
| 11963452 | Method of making piezoelectric microphone with deflection control | Rakesh Kumar, Minu Prabhachandran Nair, Nagarajan Ranganathan | 2024-04-16 |
| 11890643 | Piezoelectric micromachined ultrasonic transducer and method of fabricating the same | You Qian, Joan Josep Giner De Haro, Rakesh Kumar | 2024-02-06 |
| 11878905 | Micro-electromechanical system device and method of forming the same | — | 2024-01-23 |
| 11825750 | Micro-electromechanical system device and method of forming the same | — | 2023-11-21 |
| 11767217 | MEMS devices and methods of forming thereof | Ranganathan Nagarajan, Rakesh Kumar, Bevita Kallupalathinkal Chandran | 2023-09-26 |
| 11759823 | Piezoelectric micromachined ultrasonic transducer and method of fabricating the same | You Qian, Rakesh Kumar | 2023-09-19 |
| 11631800 | Piezoelectric MEMS devices and methods of forming thereof | Ranganathan Nagarajan, Bevita Kallupalathinkal Chandran, Miles Jacob Gehm | 2023-04-18 |
| 11575081 | MEMS structures and methods of forming MEMS structures | Bevita Kallupalathinkal Chandran, Tze Sheong Neoh | 2023-02-07 |
| 11498097 | Piezoelectric micromachined ultrasonic transducer and method of fabricating the same | Rakesh Kumar, You Qian | 2022-11-15 |
| 11267696 | MEMS devices and methods of forming thereof | Ranganathan Nagarajan, Rakesh Kumar, Bevita Kallupalathinkal Chandran | 2022-03-08 |
| 10886455 | Piezoelectric microphone with deflection control and method of making the same | Rakesh Kumar, Minu Prabhachandran Nair, Nagarajan Ranganathan | 2021-01-05 |
| 10490728 | Fabrication methods for a piezoelectric micro-electromechanical system (MEMS) | Minu Prabhachandran Nair, Zouhair Sbiaa, RAMACHANDRAMURTHY PRADEEP YELEHANKA, Rakesh Kumar | 2019-11-26 |
| 9550668 | Integrated MEMS pressure sensor and MEMS inertial sensor | Nagarajan Ranganathan, Rakesh Kumar, Aveek N. Chatterjee | 2017-01-24 |
| 9546090 | Integrated MEMS-CMOS devices and methods for fabricating MEMS devices and CMOS devices | Nagarajan Ranganathan, Rakesh Kumar, Aveek N. Chatterjee | 2017-01-17 |