Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490728 | Fabrication methods for a piezoelectric micro-electromechanical system (MEMS) | Jia Jie Xia, Minu Prabhachandran Nair, Zouhair Sbiaa, Rakesh Kumar | 2019-11-26 |
| 10358340 | Integrated circuits having shielded MEMS devices and methods for fabricating shielded MEMS devices | Humberto Campanella-Pineda, Rakesh Kumar, Zouhair Sbiaa, Nagarajan Ranganathan | 2019-07-23 |
| 10184951 | Three-axis monolithic MEMS accelerometers and methods for fabricating same | Aveek N. Chatterjee, Siddharth Chakravarty, Rakesh Kumar | 2019-01-22 |
| 8236678 | Tunable spacers for improved gapfill | Shailendra Mishra, Sripad Sheshagiri Nagarad | 2012-08-07 |
| 6093602 | Method to form polycide local interconnects between narrowly-spaced features while eliminating stringers | Weining Li, Lin Tao, Tin Tin Wee | 2000-07-25 |