Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099131 | Systems and methods for copper etch rate monitoring and control | Alex Lambert | 2021-08-24 |
| 9366601 | Wafer fabrication monitoring/control system and method | Jin-Jian Chen | 2016-06-14 |
| 7247554 | Method of making integrated circuits using ruthenium and its oxides as a Cu diffusion barrier | Thomas A. Ponnuswamy | 2007-07-24 |
| 6145372 | Apparatus and method for detecting impurities in wet chemicals | Lindsey Hall, Jennifer A. Sees | 2000-11-14 |