Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448182 | Stabilization of peroxygen-containing slurries used in a chemical mechanical planarization | Lindsey Hall, Ashutosh Misra | 2002-09-10 |
| 6372648 | Integrated circuit planarization method | Lindsey Hall | 2002-04-16 |
| 6294145 | Piranha etch preparation having long shelf life and method of making same | Lindsey Hall, Charles R. Schraeder | 2001-09-25 |
| 6145372 | Apparatus and method for detecting impurities in wet chemicals | Lindsey Hall, Oliver Ming-Ren Chyan | 2000-11-14 |
| 6048406 | Benign method for etching silicon dioxide | Ashutosh Misra, Jagdish Prasad, Lindsey Hall | 2000-04-11 |
| 6019806 | High selectivity slurry for shallow trench isolation processing | Lindsey Hall, Jagdish Prasad, Ashutosh Misra | 2000-02-01 |