Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7544305 | Chemical mechanical polishing process for forming shallow trench isolation structure | Chia-Jung Hsu, Hsiao-Ling Lu, Teng-Chun Tsai | 2009-06-09 |
| 7294575 | Chemical mechanical polishing process for forming shallow trench isolation structure | Chia-Rung Hsu, Hsiao-Ling Lu, Teng-Chun Tsai | 2007-11-13 |
| 7172970 | Polish method for semiconductor device planarization | Zong-Huei Lin, Chia-Rung Hsu, Teng-Chun Tsai | 2007-02-06 |
| 6797190 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Shih-Hsun Hsu, Hsueh-Chung Chen | 2004-09-28 |
| 6638391 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Shih-Hsun Hsu, Hsueh-Chung Chen | 2003-10-28 |