Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7294575 | Chemical mechanical polishing process for forming shallow trench isolation structure | Art Yu, Hsiao-Ling Lu, Teng-Chun Tsai | 2007-11-13 |
| 7172970 | Polish method for semiconductor device planarization | Zong-Huei Lin, Art Yu, Teng-Chun Tsai | 2007-02-06 |