Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361274 | Etching apparatus and etching method | Kwang-Myung Lee, Ki-Young Yun, Il-Kyoung Kim, Sung-wook Park, Seung-Ki Chae +8 more | 2013-01-29 |
| 7682481 | Vacuum processing apparatus | Seiichi Takahashi, Takehisa MIYAYA, Soo Boo Lim, Masayuki Satou, Yohei Ono | 2010-03-23 |
| 7497963 | Etching method | Kwang-Myung Lee, Ki-Young Yun, Seung-Ki Chae, No-Hyun Huh, Wan-Goo Hwang +3 more | 2009-03-03 |