| 7282308 |
Phase shifter film and process for the same |
Akihiko Isao, Nobuyuki Yoshioka, Kazuyuki Maetoko |
2007-10-16 |
| 7090947 |
Phase shifter film and process for the same |
Akihiko Isao, Nobuyuki Yoshioka, Kazuyuki Maetoko |
2006-08-15 |
| 6689515 |
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank |
Nobuyuki Yoshioka, Akihiko Isao, Tsuneo Yamamoto, Jun Amano, Ryoichi Kobayashi |
2004-02-10 |
| 6569577 |
Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices |
Akihiko Isao, Shuichiro Kanai, Nobuyuki Yoshioka, Kazuyuki Maetoko |
2003-05-27 |
| 6228541 |
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank |
Akihiko Isao, Tsuneo Yamamoto, Jun Amano, Ryoichi Kobayashi, Nobuyuki Yoshioka |
2001-05-08 |
| 5952128 |
Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask |
Akihiko Isao, Yoshihiro Saito, Tsuneo Yamamoto, Atsushi Hayashi, Nobuyuki Yoshioka +2 more |
1999-09-14 |
| 5938897 |
Method of manufacturing phase-shifting photomask blank |
Akihiko Isao, Yoshihiro Saito, Tsuneo Yamamoto, Atsushi Hayashi, Nobuyuki Yoshioka +2 more |
1999-08-17 |
| 5605776 |
Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them |
Akihiko Isao, Atsushi Hayashi, Nobuyuki Yoshioka, Kazuyuki Maetoko |
1997-02-25 |
| 5482799 |
Phase shift mask and manufacturing method thereof |
Akihiko Isao, Nobuyuki Yoshioka |
1996-01-09 |
| 5103551 |
Machine for holding workpiece |
Kinichi Tamura, Yoshitada Sekine, Kazuyoshi Abe, Ryosuke Ishikawa, Fumiki Yokota |
1992-04-14 |
| 5010634 |
Vehicle assembly method and apparatus |
Satoshi Uemura, Yoshitada Sekine, Tatsuo Miyauchi |
1991-04-30 |
| 5005277 |
Automated assembly arrangement for vehicle body and method of assembly |
Satoshi Uemura, Yoshitada Sekine, Tatsuo Miyauchi |
1991-04-09 |
| 4962917 |
Machine for holding workpiece |
Kinichi Tamura, Yoshitada Sekine, Kazuyoshi Abe, Ryosuke Ishikawa, Fumiki Yokota |
1990-10-16 |
| 4811935 |
Machine for holding workpiece |
Kinichi Tamura, Yoshitada Sekine, Kazuyoshi Abe, Ryosuke Ishikawa, Fumiki Yokota |
1989-03-14 |
| 4691905 |
Machine for holding workpiece |
Kinichi Tamura, Yoshitada Sekine, Kazuyoshi Abe, Ryosuke Ishikawa, Fumiki Yokota |
1987-09-08 |
