Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282308 | Phase shifter film and process for the same | Susumu Kawada, Akihiko Isao, Nobuyuki Yoshioka | 2007-10-16 |
| 7090947 | Phase shifter film and process for the same | Susumu Kawada, Akihiko Isao, Nobuyuki Yoshioka | 2006-08-15 |
| 6984473 | Method of patterning a mask blank | Teruhiko Kumada, Atsuko Fujino | 2006-01-10 |
| 6569577 | Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices | Akihiko Isao, Susumu Kawada, Shuichiro Kanai, Nobuyuki Yoshioka | 2003-05-27 |
| 5605776 | Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them | Akihiko Isao, Susumu Kawada, Atsushi Hayashi, Nobuyuki Yoshioka | 1997-02-25 |