Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6662466 | Method for two dimensional adaptive process control of critical dimensions during spin coating process | Emir Gurer, Tom Zhong, Eddie Lee | 2003-12-16 |
| 6468586 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, Kevin Golden, Scott C. Wackerman +1 more | 2002-10-22 |
| 6327793 | Method for two dimensional adaptive process control of critical dimensions during spin coating process | Emir Gurer, Tom Zhong, Eddie Lee | 2001-12-11 |
| 6254936 | Environment exchange control for material on a wafer surface | Emir Gurer, Ed C. Lee, Tom Zhong, Kevin Golden, Reese Reynolds +1 more | 2001-07-03 |