Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765034 | Pattern formation method, pattern formation apparatus, and recording medium recorded with alignment program | — | 2014-07-01 |
| 6842230 | Exposing method | Keita Asanuma, Tatsuhiko Higashiki | 2005-01-11 |
| 6741327 | Method of correcting projection optical system and method of manufacturing semiconductor device | Hiroshi Nomura, Kenji Konomi | 2004-05-25 |