Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6108140 | Catadioptric reduction projection optical system and method | Yutaka Suenaga, Yutaka Ichihara | 2000-08-22 |
| RE36740 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Hideo Mizutani, Yutaka Suenaga | 2000-06-20 |
| 5880817 | Projection-exposure apparatus and method exhibiting reduced solarization and radiation compaction | — | 1999-03-09 |
| 5844728 | Catadioptric reduction projection optical system | Yutaka Suenaga, Yutaka Ichihara | 1998-12-01 |
| 5712735 | Catadioptric reduction projection optical system | Yutaka Suenaga, Yutaka Ichihara | 1998-01-27 |
| 5636000 | Projection optical system and projection exposure apparatus using the same | Kazuo Ushida | 1997-06-03 |
| 5289312 | Catadioptric reduction projection optical system | Yutaka Ichihara | 1994-02-22 |
| 5251070 | Catadioptric reduction projection optical system | Yutaka Ichihara, Hideo Mizutani | 1993-10-05 |
| 5220454 | Cata-dioptric reduction projection optical system | Yutaka Ichihara, Hideo Mizutani, Yutaka Suenaga | 1993-06-15 |
| 4637691 | Mirror converging-type illumination optical system | Makoto Uehara | 1987-01-20 |