Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745098 | Polymer compound, positive resist composition and method of forming resist pattern | Takayoshi Mori, Hiroaki Shimizu, Kyoko Ohshita, Komei Hirahara | 2010-06-29 |
| 7741009 | Positive resist composition and method of forming resist pattern | Hiroaki Shimizu, Kyoko Ohshita, Komei Hirahara | 2010-06-22 |
| 7604920 | Positive resist composition, method of forming resist pattern, polymeric compound, and compound | Daiju Shiono, Hiroaki Shimizu | 2009-10-20 |