Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7569253 | Film-forming method | — | 2009-08-04 |
| 7300889 | Method for forming a coating film on a plate-like workpiece | Hiroki Endo, Akihiko Nakamura | 2007-11-27 |
| 7166184 | Multi-stage type processing apparatus | Akihiko Nakamura, Seiji Ohishi, Tamotsu Sasaki | 2007-01-23 |
| 7153365 | Tray for substrate | — | 2006-12-26 |
| 7005009 | Film forming apparatus, film forming method and tray for substrate | Seiji Ohishi, Hiroshi Yamabe, Hitoshi Obata | 2006-02-28 |
| 6609909 | Heat treatment apparatus and method | Akihiko Nakamura, Akinori Nishie | 2003-08-26 |
| 6287067 | Processing unit and processing unit structure by assembling thereof | Hidenori Miyamoto, Susumu Okano, Koji Ueda | 2001-09-11 |
| 6071673 | Method for the formation of resist pattern | Etsuko Iguchi, Toshimasa Nakayama | 2000-06-06 |