Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9269581 | Method of producing solar cell | Katsuya Tanitsu, Shinji Goda, Takayuki Ogino, Futoshi Kato, Ayumu Imai +1 more | 2016-02-23 |
| 8449945 | Coating apparatus, coating method and coating-film forming apparatus | Akihiko Nakamura | 2013-05-28 |
| 8132526 | Coating apparatus, coating method and coating-film forming appratus | Akihiko Nakamura | 2012-03-13 |
| 7611581 | Coating apparatus, coating method and coating-film forming apparatus | Akihiko Nakamura | 2009-11-03 |
| 7166184 | Multi-stage type processing apparatus | Akihiko Nakamura, Taiichiro Aoki, Tamotsu Sasaki | 2007-01-23 |
| 7005009 | Film forming apparatus, film forming method and tray for substrate | Taiichiro Aoki, Hiroshi Yamabe, Hitoshi Obata | 2006-02-28 |