Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4577165 | High-frequency oscillator with power amplifier and automatic power control | Takashi Uehara, Miyuki Saito, Toshiyuki Ishida | 1986-03-18 |
| 4550239 | Automatic plasma processing device and heat treatment device | Isamu Hijikata, Hisashi Nakane, Muneo Nakayama | 1985-10-29 |
| 4550242 | Automatic plasma processing device and heat treatment device for batch treatment of workpieces | Isamu Hijikata, Hisashi Nakane, Muneo Nakayama | 1985-10-29 |
| 4483651 | Automatic apparatus for continuous treatment of leaf materials with gas plasma | Hisashi Nakane, Shigekazu Miyazaki, Hiroyuki Kiyota, Isamu Hijikata | 1984-11-20 |
| 4465553 | Method for dry etching of a substrate surface | Isamu Hijikata, Hisashi Nakane | 1984-08-14 |
| 4336438 | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Hiroyuki Kiyota, Shigekazu Miyazaki, Hisashi Nakane | 1982-06-22 |
| 4318767 | Apparatus for the treatment of semiconductor wafers by plasma reaction | Isamu Hijikata, Hisashi Nakane | 1982-03-09 |
| 4245154 | Apparatus for treatment with gas plasma | Hiroyuki Kiyota, Hisashi Nakane, Shozo Toda | 1981-01-13 |
| 4208159 | Apparatus for the treatment of a wafer by plasma reaction | Hisashi Nakane | 1980-06-17 |