Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658012 | Control method and plasma processing apparatus | Toshiyuki ARAKANE, Tetsu TSUNAMOTO, Masanori Sato | 2023-05-23 |
| 11462431 | Discharging method and substrate processing apparatus | Toshiyuki ARAKANE, Tetsu TSUNAMOTO, Masanori Sato | 2022-10-04 |
| 10720313 | Measuring device, measurement method, and plasma processing device | Masanori Sato, Ryusei KASHIMURA, Tetsu TSUNAMOTO, Toshiyuki ARAKANE | 2020-07-21 |
| 9331307 | Method for manufacturing organic EL device and organic EL device | Shigenori Morita | 2016-05-03 |
| 7915179 | Insulating film forming method and substrate processing method | Yoshihiro Sato, Tomoe Nakayama, Hiroshi Kobayashi, Tetsuro Takahashi | 2011-03-29 |