Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664263 | Substrate processing method and substrate processing apparatus | Yusuke Aoki | 2023-05-30 |
| 11456199 | Measurement method and measuring jig | Masanori Sato, Tetsu TSUNAMOTO | 2022-09-27 |
| 10720313 | Measuring device, measurement method, and plasma processing device | Masanori Sato, Tetsu TSUNAMOTO, Yoshinori Osaki, Toshiyuki ARAKANE | 2020-07-21 |