Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658012 | Control method and plasma processing apparatus | Tetsu TSUNAMOTO, Masanori Sato, Yoshinori Osaki | 2023-05-23 |
| 11462431 | Discharging method and substrate processing apparatus | Tetsu TSUNAMOTO, Yoshinori Osaki, Masanori Sato | 2022-10-04 |
| 10720313 | Measuring device, measurement method, and plasma processing device | Masanori Sato, Ryusei KASHIMURA, Tetsu TSUNAMOTO, Yoshinori Osaki | 2020-07-21 |