Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658012 | Control method and plasma processing apparatus | Toshiyuki ARAKANE, Masanori Sato, Yoshinori Osaki | 2023-05-23 |
| 11462431 | Discharging method and substrate processing apparatus | Toshiyuki ARAKANE, Yoshinori Osaki, Masanori Sato | 2022-10-04 |
| 11456199 | Measurement method and measuring jig | Ryusei KASHIMURA, Masanori Sato | 2022-09-27 |
| 10720313 | Measuring device, measurement method, and plasma processing device | Masanori Sato, Ryusei KASHIMURA, Yoshinori Osaki, Toshiyuki ARAKANE | 2020-07-21 |