YI

Yasushi Inata

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,401,951 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7300881 Plasma etching method Kazuya Kato, Katsuhiko Ono, Hideki Mizuno, Masahiro Ogasawara, Akinori Kitamura +2 more 2007-11-27